Micro Triboelectric Ultrasonic Device for Acoustic Energy Transfer and Signal Communication
Chen Chen1,2, Zhen Wen1*, Jihong Shi1, Xiaohua Jian3, Peiyang Li3, John T. W. Yeow 2* & Xuhui Sun1*
1Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University, No. 199 Ren-ai Road Suzhou Industry Park, 215123, Suzhou, China
2Advanced Micro-/Nano-Devices Lab, Department of Systems Design Engineering, Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada
3Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, No. 88 Keling Road Suzhou New District, 215163, Suzhou, China
As a promising energy converter, the requirement for miniaturization and high-accuracy of triboelectric nanogenerators always remains urgent. In this work, a micro triboelectric ultrasonic device was developed by integrating a triboelectric nanogenerator and micro-electro-mechanical systems technology. To date, it sets a world record for the smallest triboelectric device, with a 50??m-sized diaphragm, and enables the working frequency to be brought to megahertz. This dramatically improves the miniaturization and chip integration of the triboelectric nanogenerator. With 63?kPa@1?MHz ultrasound input, the micro triboelectric ultrasonic device can generate the voltage signal of 16.8?mV and 12.7?mV through oil and sound-attenuation medium, respectively. It also achieved the signal-to-ratio of 20.54?dB and exhibited the practical potential for signal communication by modulating the incident ultrasound. Finally, detailed optimization approaches have also been proposed to further improve the output power of the micro triboelectric ultrasonic device.