Magnetron sputter

time:2016-05-17Hits:11设置

Instrument name


Magnetron Sputter

Model

PVD75

Manufacturer


KURT J.LESKER COMPANY

Specifications

1.There are three sputtering targets with 2 diameter,

and one of them could sputter ferro magnetic material.

2.Power Supply: RF and DC Power Supply

3.Shutter: There are 3 source shutter and 1 substrate

shutter

4.Ultimate Vacuum5*10-5 PaWork Background Vacuum7*10-4 Pa

5.Platen Size: Up to 4 diameter

6.Heating: 500 

7.System ControlPC+PLC Control

Applications and Uses

Magnetron sputter is a universal metal coating machine, used for depositing of single-layer or multi-layer metal film. It could be mainly used for the metal, semiconductor, oxide et. al. electrodes preparation in the field of nano-device and organic photoelectric device.

Accessories

Mechanical Pump

Contact: Mingfa Peng

Tel.: 65883196

E-mailmfpeng@suda.edu.cn





























                                          Editor: Mingfa Peng

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