Electron beam evaporator

time:2016-05-17Hits:85设置

Instrument name

Electron Beam Evaporator

Model

PVD75

Manufacturer

KURT J.LESKER COMPANY

Specifications

1. Platen Size: Up to 12" (305 mm) diameter

2. Electron Gun Power: 5-10 KW

3. Ultimate Vacuum: 5×10-5 Pa

4. Pump Speed: 3*10-4 Pa/20 min

5. Heating : 350

6. Temperature Uniformity: ±10 

7. Rotation: Variable up to 20 RPM

8. Crucible Number: 4

9. Coating uniformity: ±5%Al

10. System Control: PC+PLC control

Applications and Uses

Electron beam evaporator is a universal metal coating machine, used for depositing of single-layer or multi-layer metal film. It could be mainly used for the metal electrodes preparation in the field of nano-device and organic photoelectric device, and also for growth catalyst film layer.

Accessories

Mechanical Pump

ContactMingfa Peng

Tel65883196

E-mail: mfpeng@suda.edu.cn





























                                          Editor: Mingfa Peng

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