Academic Talk: Scanning microwave impedance microscopy (sMIM) technology


Presenter:Bo Liu (Doctor, Primenano sales manager in China)

Topic: Scanning microwave impedance microscopy (sMIM) technology

Time:  10: 30 am, Octobrt 13rd (Saturday)

Location: Conference Room 308, BLDG 910


Abstract: sMIM is a technique for materials electrical measurement. It is compatible with various mainstream AFM. You can measure the samples’ topography and obtain the electrical properties simultaneously like conductivity, dielectric constant, carries density and doping type. sMIM has ultrahigh spatial resolution and electrical resolution based on resistant measurement of microwave, and no request for sample preparation. It can be used to study many different materials, including conductor, semiconductor, insulator or dielectric and buried structure etc.. And it has significant application in the field of semiconductor, phase change material, nanoscience and ferroelectric materials. Based on the sMIM technology, there are plenty of scientific papers in prestigious international journals include Science, Nature, Physics Review Letters, Nano Letters etc.





Primenano is founded by Prof. Zhixun Shen and Prof. Mike Kelly from Stanford University and the headquarter is located in Silicon Valley, California. Primenano is the leader of microwave microscopy market and obtains majority market shares in a short time. The existing customers include NIST, TSMC Taiwan, Qinghua University, Fudan University, Nanjing University, NMT and SIMIT etc.. More information can be found in:

Bo Liu (Phd), Primenano sales manager in China, graduated from Nanyang Technological University, Singapore. He has worked in GLOBAL FOUNDRIES and published more than 20 papers.

Contact: Prof. Mario Lanza

Editor: Ming Lu


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